| 压电薄膜微机电加速度传感器的力学分析 |
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| 引用本文： | 孙博华,韩立锋.压电薄膜微机电加速度传感器的力学分析[J].上海大学学报(自然科学版),2009,15(6):621-627. |
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| 作者姓名： | 孙博华 韩立锋 |
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| 作者单位： | （开普半岛理工大学 机械工程系，南非 开普敦 7535） |
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| 摘 要： | 基于压电薄膜的压电效应，研究压电薄膜微机电加速度传感器.对双层压电薄膜微机电加速度传感器进行静力分析，得到传感器方程，并进行数值计算.结果表明，随着压电薄膜厚度的增大，灵敏度随之增大，在一定厚度下达到最大值，随着厚度的进一步增大，灵敏度反而减小.然后进行动力分析，得到噪音、质量因子、最小可测信号等技术参数，并进行了数值计算.运用ANSYS软件进行谐响应分析，得到不同频率下结构的动力响应曲线.
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| 关 键 词： | 微机电加速度传感器 压电效应 压电薄膜 灵敏度 |
| 收稿时间： | 2009-03-11 |
Mechanical Analysis of Micromachined Accelerometer with Piezoelectric Thin Films Read-out |
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| SUN Bo-hua,HAN Li-feng.Mechanical Analysis of Micromachined Accelerometer with Piezoelectric Thin Films Read-out[J].Journal of Shanghai University(Natural Science),2009,15(6):621-627. |
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| Authors: | SUN Bo-hua HAN Li-feng |
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| Institution: | (Department of Mechanical Engineering, Cape Peninsula University of Technology, Cape Town 7535, South Africa) |
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| Abstract: | A micromaehined accelerometer with piezoelectric thin film based on the piezoelectric effect is studied.By static analysis of accelerometer with two-layer piezoelectric thin film(PZT),a sensitivity formula iS derived.and numerical calculation is then performed.It iS found that sensitivity first increases With the increase of PZT thickness.and reversed when the thickness reaches a certain level.Dynamics analysis iS discussed.Noise,the quality factor and the minimum detectable signal are obtained.Curves of the dynamic response can be obtained with ANSYS in the harmonic analysis. |
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| Keywords: | mieromachined accelerometer piezoelectric effect piezoelectric thin film sensitivity |
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