基于AFM纳米加工机理和方法的研究进展

作者介绍了近期基于AFM纳米加工方法的最新研究进展，探讨了AFM纳米加工过程中的机理，重点分析了利用AFM针尖诱导表面氧化，针尖诱导表面改性，纳米刻蚀加工，纳米化学反应，单分子，单原子操纵及纳米结构组装等6种基于AFM的纳米加工方法，为今后纳米信息产品的研究和开发奠定了基础，纳米加工技术是一门综合性的交叉学科，研究内容涉及到物理学、化学、生物学、材料学以及机械学等许多方面，文中不仅指出了理阶段研究中存在的问题，并提出了今后需要重视的研究方向。

Advance of Nanofabrication Methods and Mechanisms Based on AFM

In recent years, nanofabrication technology, considered as a breakthrough of human cognition and a leap of technology and an innovation of industry, has attracted wide attention from scientists. Because AFM (Atomic Force Microscope) not only can detect local spatial and electronic structure of material surface with atom scale resolution, but also has strong maneuverability to manipulate single atoms, and single molecules, and construct NEMS(Nanoelectromechanical Systems). It has greatly improved our ability of characterizing the structures of single molecules, studying the methods and mechanisms, and even constructing new nano scale information products. The recent advance on nanofabrication methods with AFM is introduced in this paper. The nanofabrication methods and mechanisms based on AFM, including tip induced modifying, nano level etching, nano chemical reaction, single atom, single molecular manipulations, and nanostructure construction, are analyzed to lay a foundation for studying and developing nano information products. Nanofabrication technology involves quite a number of subjects including physics ,chemistry ,biology, material science and machinery science. Based on the existing problems in the development of nanofabrication, the research directions that must be addressed at present are proposed as well.