| 溅射a-GeCN_x∶H薄膜的红外和拉曼特性 |
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| 引用本文： | 陈光华,马书懿,张仿清.溅射a-GeCN_x∶H薄膜的红外和拉曼特性[J].兰州大学学报(自然科学版),1993(4). |
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| 作者姓名： | 陈光华 马书懿 张仿清 |
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| 作者单位： | 兰州大学物理学系 兰州730000
(陈光华，马书懿)，兰州大学物理学系 兰州730000(张仿清) |
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| 摘 要： | 本文首次报道了用溅射反应法制备的 a-GeCN_x∶H 薄膜的制备工艺、红外和拉曼谱的特性,并观测到因掺碳引起的新的 N-CH_n 的红外吸收峰.
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| 关 键 词： | 溅射法 薄膜 红外谱 拉曼谱 |
IR and Raman Properties of Sputtered Amorphous GeCN:H Films |
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| Chen Guanghua,Ma Shuyi,Zhang Fangqing.IR and Raman Properties of Sputtered Amorphous GeCN:H Films[J].Journal of Lanzhou University(Natural Science),1993(4). |
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| Authors: | Chen Guanghua Ma Shuyi Zhang Fangqing |
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| Abstract: | IR,Raman properties and preparation conditions of the a-GeC_N:H films pre-pared by rf-reactive sputtering method are reported for the first time.A new absorptionpeak related to N-CHn was observed due to the incorporation of carbon atoms. |
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| Keywords: | sputtering method thin film Infrared spectrum Raman spectrum |
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