| Abstract: | The characteristics of several different linear motors have been investigated, and the feed drive system with linear motor instead of screw-nut mechanism has been built for a submicro ultraprecision turning machine. In the control system for the feed drive system arranged as "T", both P-position and PI-speed control loops are used. The feedback variable is obtained from a double frequecy laser interferometor. Experiments show that the feed drive with linear motor is simple in construction, and that its dynamics is better than others. So the machining accuracy of the workpiece machined has been successfully improved. |
