| 溅射法制备的YSZ薄膜电性能 |
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| 作者单位： | 遵化农中 |
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| 摘 要： | 应用交流阻抗谱技术研究了用射频磁控溅射法在Ａｌ２Ｏ３ 基板上制备的ＹＳＺ薄膜电性能。结果表明，在清洁的基板上制备的ＹＳＺ薄膜经６００℃以上热处理后具有较高的电导率，完全可以作为固体电解质使用。
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| 关 键 词： | 射频磁控溅射法 YSZ薄膜 |
THE ELECTRIC PROPERTIES OF YSZ THIN FILM PREPARED BY RF SPUTTERING METHOD |
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| Ma Jingting Wang Ling. THE ELECTRIC PROPERTIES OF YSZ THIN FILM PREPARED BY RF SPUTTERING METHOD[J]. Journal of Hebei Institute of Technology, 1999, 0(4) |
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| Authors: | Ma Jingting Wang Ling |
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| Affiliation: | Ma Jingting Wang Ling (Agricultural school of Zunhua City) (Department of chemical engineering) |
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| Abstract: | |
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| Keywords: | RF magnetron sputtering method YSZ thin film |
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