| 非均匀电场中电子在H2/CH4混合气体中运动的数值模拟 |
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| 引用本文： | 辛红丽,韩佳宁,赵庆勋,文钦若.非均匀电场中电子在H2/CH4混合气体中运动的数值模拟[J].河北大学学报(自然科学版),2001,21(4). |
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| 作者姓名： | 辛红丽 韩佳宁 赵庆勋 文钦若 |
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| 作者单位： | 河北大学,物理科学与技术学院,河北,保定,071002 |
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| 基金项目： | 河北省自然科学基金资助项目 (5 990 91) |
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| 摘 要： | 用MonteCarlo数值模拟方法研究了辉光等离子体辅助化学气相沉积法 (GPCVD)低温合成金刚石的过程中 ,电子在H2 /CH4 混合气体中的运动 .本文在数值模拟中 ,采用非匀强电场 ,并考虑了电子的雪崩过程 ,实现了对须跟踪的粒子数不断增长的系统的MonteCarlo模拟 ,给出了电子的能量分布及角分布
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| 关 键 词： | Monte Carlo方法 等离子体 电子运动 |
Numerical Simulation of Electron Motion in the Mixture of H2/CH4 in a Non-uniform Field |
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| XIN Hong li,HAN Jia ning,ZHAO Qing xun,WEN Qin ruo.Numerical Simulation of Electron Motion in the Mixture of H2/CH4 in a Non-uniform Field[J].Journal of Hebei University (Natural Science Edition),2001,21(4). |
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| Authors: | XIN Hong li HAN Jia ning ZHAO Qing xun WEN Qin ruo |
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| Abstract: | Monte Carlo simulation is adopted to study the electron motion in the mixture of H 2 and CH 4 during diamond synthesis via Glow Plasma assisted Chemical Vapor Deposition (GPCVD). The non-uniform electric field is used and the avalanche of electrons is taken into account in this simulation. The Monte Carlo technique for simulating the evolution of an assembly of particles increasing in number is successfully applied in the obtaining of the energy and angle distribution of the electrons. |
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| Keywords: | Monte Carlo simulation plasma electron motion |
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