| 热处理温度对溶胶-凝胶法制备的Ce_(0.97)Co_(0.03)O_2薄膜结构和光学性能的影响 |
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| 引用本文： | 阳生红,张曰理.热处理温度对溶胶-凝胶法制备的Ce_(0.97)Co_(0.03)O_2薄膜结构和光学性能的影响[J].中山大学学报(自然科学版),2014,53(3):146-149. |
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| 作者姓名： | 阳生红 张曰理 |
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| 作者单位： | 中山大学光电材料与技术国家重点实验室∥物理科学与工程技术学院,广东 广州 510275 |
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| 基金项目： | 国家自然科学基金资助项目(61176010,61172027) |
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| 摘 要： | 采用溶胶-凝胶法,在Si(100)衬底上制备了3%Co掺杂CeO2薄膜,研究了不同热处理温度对Ce0.97Co0.03O2薄膜结构和光学性质的影响。X射线衍射(XRD)表明,3%Co掺杂CeO2薄膜为多晶薄膜,且未破坏CeO2原有的结构,随着退火温度的升高,晶粒尺寸逐渐增大。椭偏光谱法研究表明,Ce0.97Co0.03O2薄膜的光学常数(折射率n、消光系数k)随着退火温度增加而增大,光学带隙Eg随退火温度增加而减小,这是薄膜结构随退火温度增加发生变化所致。
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| 关 键 词： | %Co掺杂CeO薄膜 溶胶-凝胶法 光学性质 |
| 收稿时间： | 2013-09-04; |
Influence of Annealing Temperature on Structural and Optical Properties ofCe0.97Co0.03O2 Thin Films Prepared by Sol-Gel Method |
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| YANG Shenghong,ZHANG Yueli.Influence of Annealing Temperature on Structural and Optical Properties ofCe0.97Co0.03O2 Thin Films Prepared by Sol-Gel Method[J].Acta Scientiarum Naturalium Universitatis Sunyatseni,2014,53(3):146-149. |
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| Authors: | YANG Shenghong ZHANG Yueli |
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| Institution: | State Key Laboratory of Optoelectronic Materials and Technologies∥School of Physics & Engineering, Sun Yat-sen University, Guangzhou 510275,China |
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| Abstract: | 3%Co doped CeO2 thin films were prepared on Si(100) by Sol Gel method. The influence of annealing temperature on the structural and optical properties of Ce0.97Co0.03O2 thin films was studied. X-ray diffraction (XRD) showed that 3%Co doped CeO2 thin films were polycryatalline with the same structure of CeO2. The average crystallite size increased with increasing annealing temperature. Spectroscopic ellipsometry (SE) studies showed that the optical constants (the refractive index n and the extinction coefficient k) of Ce0.97Co0.03O2 thin films increase with increasing annealing temperature, and the optical band gap Eg decrease as increasing annealing temperature. The variation in optical properties with annealing temperature revealed that the film structure was affected by annealing. |
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| Keywords: | 3%Co doped CeO2 thin films" target="_blank">2 thin films')" href="#">3%Co doped CeO2 thin films Sol-Gel method optical properties |
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