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用溅射方法制备金属超微粒
引用本文:李建,梁一平.用溅射方法制备金属超微粒[J].西南师范大学学报(自然科学版),1993,18(4):432-436.
作者姓名:李建  梁一平
作者单位:西南师范大学物理系 重庆630715 (李建,梁一平,刘存业,任洪湘),西南师范大学物理系 重庆630715(刘荣泰)
摘    要:研究了一种制备金属超微粒的新物理方法——溅射法.介绍了该方法的装置并阐明了其基本物理原理.通过Ag、Au超微粒的制备及其透射电子显微镜和X射线衍射仪观察与分析表明,用此法可制备纳米量级的球形金属结晶超徽粒.

关 键 词:溅射法  金属  超微粒  零族元素

PRODUCING OF METAL ULTRAFINE PARTICLES BY THE SPUTTERING METHOD
Li Jian Liang Yiping Liu Cunye Ren Hongxiang Liu Yongtai.PRODUCING OF METAL ULTRAFINE PARTICLES BY THE SPUTTERING METHOD[J].Journal of Southwest China Normal University(Natural Science),1993,18(4):432-436.
Authors:Li Jian Liang Yiping Liu Cunye Ren Hongxiang Liu Yongtai
Abstract:A new method of metal ultrafine particle producing has advanced. The equipment for the method was introduced and its basic physical principle was also explained. The Ag, Au ultrafine particles, produced by the methode, were observed and analyzied with TEM and XRD, which shows that the . nanometer scale of spherical metal ultrafine particles can be produced by the methode.
Keywords:sputter methods  Inert gas  Metallic ultrafine particle
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