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紫外脉冲激光对聚氯乙烯(PVC)塑料刻蚀产物的研究
引用本文:方尔梯,曾宪康,黄正宇,张抗战,张谊华,滕玉美.紫外脉冲激光对聚氯乙烯(PVC)塑料刻蚀产物的研究[J].华东理工大学学报(自然科学版),1995(1).
作者姓名:方尔梯  曾宪康  黄正宇  张抗战  张谊华  滕玉美
作者单位:华东理工大学化学物理研究室
摘    要:利用四极质谱和离子能量分析器,测定了紫外激光刻蚀PVC塑料产生的分子、原子和离子产物的质量分布和各种离子的平动能分布,研究了激光通量对刻蚀的影响,发现离子的产生需要比中性产物有更高的激光阈值,讨论了紫外激光对PVC塑料的刻蚀剥离机理。

关 键 词:激光  烧蚀  聚氟乙烯塑料  紫外脉冲激光  质谱

A Products Research of the PVC Plastic Ablation by UV Pusle Laser
Fanq Erti,Zeng Xiankanq, Huang Zhengyu,Zhang Kangzhan, Zhang Yihua and Teng Yumei.A Products Research of the PVC Plastic Ablation by UV Pusle Laser[J].Journal of East China University of Science and Technology,1995(1).
Authors:Fanq Erti  Zeng Xiankanq  Huang Zhengyu  Zhang Kangzhan  Zhang Yihua and Teng Yumei
Abstract:A quadrupole mass spectrometer and an ionic energy analyser have been usedto examine the mass and translational energy distributions of molecules,atoms and ions produced in UV laser ablation of PVC plastic. By studying the effect of laser fluence on ablationprocess, We find that the fluence threshold to produce ions is higher than that of neutralproducts. The mechanism of UV laser induced ablation of PVC based on our results has beendiscussed.
Keywords:laser  ablation  PVC plastic  UV pulse laser  mass spectrography
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