微波等离子体的双探针诊断

在各等离子体中微波等离子体有电离度高，电子密度高等优良性能，其性能使微波等离子体的应用越来越广泛。微波等离子体相关参数的诊断研究也逐渐得到人们的重视。文章介绍了微波等离子体的探针诊断技术，设计了一个双探针自动诊断系统，其中ICL8083芯片作为信号发生器（产生三角波和方波），高度集成化的ADUC845芯片作数据处理器并接入计算机，经扫描采样得到离子密度波形和电压波形，取得了较好的实验结果。

Double-Probe Diagnosis of Microwave Plasma

Among all plasmas, the microwave plasma has such advantages as high degree of ionization and high electron density. It is getting more widely used than ever. Studies on its parameter are also getting more attention. This paper presents the probe diagnosis technique of the microwave plasma. A double-probe automatic measurement system is designed. In this system, the ICL8083 chip is used as the signal-generator which generates the triangular wave or square wave, and the ADuC845 chip is used as the data processor which sends the data from double probe to the computer. The ion density wave and the voltage wave are obtained after scanning and sampling. Good results have been achieved.