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氢敏传感器的开发研究
引用本文:陈国强,乔志刚. 氢敏传感器的开发研究[J]. 山东科技大学学报(自然科学版), 1995, 0(4)
作者姓名:陈国强  乔志刚
作者单位:泰山科学院
摘    要:半导体氢敏传感器是一种新型气敏元件。它是以金属钯作为栅极,由Pd─Sio_2─Si构成的钯栅场效应管。本文研究了它的结构及性能,它可用于氢气的探漏与检测,也可间接地实现对其他气体如变压器油、煤气等含氢气体的检测与预报。

关 键 词:钯;催化;活性;氢敏传感器

Research on Development of Hydrogen sensor
Chen Guoqiang,Qiao Zhigang. Research on Development of Hydrogen sensor[J]. Journal of Shandong Univ of Sci and Technol: Nat Sci, 1995, 0(4)
Authors:Chen Guoqiang  Qiao Zhigang
Affiliation:Chen Guoqiang;Qiao Zhigang(Tai' shan Institute of Science)(Dept. of Mech. & Eel.Eng.)
Abstract:Semiconductor Hydrogen Sensor is a new type of gas-sensitive element.It has grid of metal Palladium and palladium field effect tube composed of Pd-Sio_2-Si.This article focuses on the structure and utilization of the sensor. It can be used in leak-hunting and testing of hydrogen, As for other hydrogen-existing gas such as transformer oil and coal gas,it can also be used for testing and forecasting in an indirect way.
Keywords:palladium  catalysis  active  hydrogen Sensor  
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