| Experimental Study on the Surface Modification of Ultra Thin DLC Films |
| |
| 作者姓名： | 朱守星 朱世根 |
| |
| 作者单位： | School of Mechanical Engineering, Donghua University, Shanghai 200051 |
| |
| 摘 要： | Surface modification of Diamond-like carbon （DLC） films was carried out in order to estimate the reliability of the ultra thin DLC films. The wear resistance, conductivity and mechatronic reliability of the films were studied by contact atomic force microscope （AFM）, electric force microscope （EFM） and conductive AFM. The failure mechanism of pits formed and the reason for conductivity changed of DLC films were examined.
|
| 关 键 词： | 原子力显微镜 超薄金刚石薄膜 表面改性 机电耦合 缺陷 |
| 收稿时间： | 2004-07-14 |
Experimental Study on the Surface Modification of Ultra Thin DLC Films |
| |
| ZHU Shou-xing,ZHU Shi-gen.Experimental Study on the Surface Modification of Ultra Thin DLC Films[J].Journal of Donghua University,2005,22(3):85-87. |
| |
| Authors: | ZHU Shou-xing ZHU Shi-gen |
| |
| Abstract: | Surface modification of Diamond-like carbon (DLC) films was carried out in order to estimate the reliability of the ultra thin DLC films. The wear resistance, conductivity and mechatronic reliability of the films were studied by contact atomic force microscope (AFM), electric force microscope (EFM) and conductive AFM. The failure mechanism of pits formed and the reason for conductivity changed of DLC films were examined. |
| |
| Keywords: | Atomic force microscope Diamond-like carbon Surface modification Electromechanical coupling |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
