| 金刚石薄膜场致发射的研究 |
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| 引用本文： | 唐敦乙,林书铨,张志明,沈荷生,李胜华.金刚石薄膜场致发射的研究[J].上海交通大学学报,2000,34(2):212-214. |
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| 作者姓名： | 唐敦乙 林书铨 张志明 沈荷生 李胜华 |
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| 作者单位： | 1. 上海交通大学,HDTV研究所,上海,200030
2. 上海交通大学,微电子研究所 |
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| 摘 要： | 给出了以硅片和钼片作基底，在不同掺杂状态下的几种金刚石薄膜的发射特性和两种金刚石
薄膜的扫描电子显微镜照片及喇曼光谱.测试结果表明，掺杂后的金刚石薄膜的发射电流密
度可增大一个数量级.
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| 关 键 词： | 场致发射 金刚石薄膜 掺杂 显示器件 FED LCD |
| 文章编号： | 1006-2467(2000)02-0212-03 |
Field Emission from the Diamond Film |
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| TANG Dun-yi,LIN Shu-quan,ZHANG Zhi-min,SHEN He-sheng,LI Sheng-hua.Field Emission from the Diamond Film[J].Journal of Shanghai Jiaotong University,2000,34(2):212-214. |
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| Authors: | TANG Dun-yi LIN Shu-quan ZHANG Zhi-min SHEN He-sheng LI Sheng-hua |
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| Abstract: | The mechanisim of field emission was explained. Several cathodes of different type used in the field emission display were described. The features of the field emission display were depicted. The emission characteristic of several types of the diamond film, which is prepared at different dope condition and on substrate of silicon or molybdenum, was reported. The results show that the density of emission current from doped diamond film is increased by one order of magnitude. |
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| Keywords: | field emission diamond film dope field emission display |
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