| 基于机器微视觉的微结构平面运动测试技术 |
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| 引用本文： | 金翠云 靳世久 栗大超 冯亚林 郝一龙. 基于机器微视觉的微结构平面运动测试技术[J]. 天津大学学报(自然科学与工程技术版), 2005, 38(3): 248-252 |
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| 作者姓名： | 金翠云 靳世久 栗大超 冯亚林 郝一龙 |
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| 作者单位： | [1]天津大学精密测试技术及仪器国家重点实验室,天津300072 [2]北京大学微电子学研究院,北京100871 |
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| 基金项目： | “863”高技术研究发展计划资助项目(2002AA404090). |
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| 摘 要： | 为了对MEMS的微结构平面运动特性参数进行提取和分析，基于机器微视觉构建MEMS动态测试系统，提出模糊图像合成技术．在连续光照明下获取微结构运动图像，利用光学检测方法增强模糊特征带，引入亚像素定位技术提取特征结构边缘，最终获得微结构的平面运动特性参数．实验结果表明，该系统测量误差小于100nm，具有较好的测量重复性精度，与现有系统相比，该系统测量原理简单，实现方便，且能满足微结构的测试需求．
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| 关 键 词： | 微机电系统 机器微视觉 动态测试 模糊图像 光学检测 亚像素 |
| 文章编号： | 0493-2137(2005)03-0248-05 |
| 修稿时间： | 2003-10-08 |
Measurement Technique of in-Plane Motion for Micro-Structure Based on Machine Micro-Vision |
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| JIN Cui-yun,JIN Shi-jiu,LI Da-chao,FENG Ya-lin,HAO Yi-long. Measurement Technique of in-Plane Motion for Micro-Structure Based on Machine Micro-Vision[J]. Journal of Tianjin University(Science and Technology), 2005, 38(3): 248-252 |
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| Authors: | JIN Cui-yun JIN Shi-jiu LI Da-chao FENG Ya-lin HAO Yi-long |
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| Affiliation: | JIN Cui-yun~1,JIN Shi-jiu~1,LI Da-chao~1,FENG Ya-lin~2,HAO Yi-long~2 |
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| Abstract: | Based on machine micro-vision,micro electro-mechanical system(MEMS) dynamic testing system was set up to measure dynamic parameters for micro-structure. Blur image synthesis technique was presented to extract and analyze in-plane motion characteristics of MEMS micro-structure. In the condition of continuous lighting, motion images of micro-structure were acquired. Using optical measuring method the blur belt was enhanced. Technique of subpixel location was introduced to extract edge of characteristics structure. The in-plane motion characteristics of MEMS were obtained at last. Experimental results indicated that the error of measurement is less then 100 nm and the precision of repetition measurment is high. The system has the advantages of easier measuring theory and more convenient realization compared with other testing system. |
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| Keywords: | micro electro-mechanical system machine micro-vision dynamic testing blur image optical measuring subpixel |
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