柔性衬底上金属褶皱结构制备及相关特性研究

采用磁控溅射技术在聚二甲基硅氧烷(PDMS)上制备金属褶皱结构,有效地解决了柔性结构发生形变时电阻值发生较大改变甚至失效的问题。研究了不同溅射时间对金属褶皱结构周期及高度的影响,并对金属褶皱结构的电学性能进行测试。利用原子力显微镜分析表征柔性衬底上金属褶皱结构的表面形貌,利用数字万用表进行样品表面电阻值的测量。测试结果表明:随着溅射时间的增加,金属褶皱结构的周期和高度都呈增大趋势,电阻增长率变得缓慢,对信号的响应程度也越来越小。

Preparation and characteristics of metal wrinkle on flexible substrates

Wrinkle electrodes were deposited on flexible polyimide substrates by magnetron sputtering method, solved the resistance changed and even failure problems effectively. The effects of sputtering time on the cycle and height of wrinkle electrodes were carried out. Atomic force microscope (AFM) was used to examine the surface morphology of the wrinkle electrodes. The digital multimeter was used to measure the resistance of the sample surface. The results show that, with the increase of the sputtering time, the cycle and the height of wrinkle electrode are increased, and the resistance rate becomed slow. The degree of response signal is becoming more and more small.