| W/SiC纳米多层膜的调制结构及调制界面 |
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| 引用本文： | 李戈扬,韩增虎,田家万,张惠娟. W/SiC纳米多层膜的调制结构及调制界面[J]. 上海交通大学学报, 2002, 36(1): 47-50 |
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| 作者姓名： | 李戈扬 韩增虎 田家万 张惠娟 |
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| 作者单位： | 1. 上海交通大学,金属基复合材料国家重点实验室,上海,200030
2. 上海交通大学,教育部高温材料及高温测试开放实验室,上海,200030 |
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| 摘 要： | 采用XRD和HREM技术研究了多靶磁控溅射法制备的W／SiC纳米多层膜的微结构，结果表明，在多层膜中，SiC调制层为非晶态；W调制层在大调制周期时为纳米晶，随调制周期减小逐渐转变为非晶态，W／SiC纳米多层膜的调制结构界面平直，清晰，周期性好，而在原子尺度上，界面存在一个成分混合和结构调整的过渡区。
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| 关 键 词： | W／SiC纳米多层膜 调制结构 调制界面 钨／碳化硅 |
| 文章编号： | 1006-2467(2002)01-0047-04 |
Modulation Structure and Modulation Interface of W/SiC Nanometer Multilayers |
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| LI Ge yang ,HAN Zeng hu ,TIAN Jia wan ,ZHANG Hui juan. Modulation Structure and Modulation Interface of W/SiC Nanometer Multilayers[J]. Journal of Shanghai Jiaotong University, 2002, 36(1): 47-50 |
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| Authors: | LI Ge yang HAN Zeng hu TIAN Jia wan ZHANG Hui juan |
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| Affiliation: | LI Ge yang 1,HAN Zeng hu 1,TIAN Jia wan 1,ZHANG Hui juan 2 |
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| Abstract: | The modulation structure and modulation interface of W/SiC nanometer multiayers, which are prepared with multi target magnetron sputtering system, were characterized by XRD and HREM. The results show that SiC layers exist as amorphous and W layers as nanometer crystals in the nanometer multilayers. The W crystals change gradually into amorphous structure with the reduction of the modulation wavelength. The multilayers films show that their modulation structure has a good periodicity and their interfaces are straight and smooth. However, the modulation interface is rough and consists of a transition zone of composition and structure in atomic scale. |
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| Keywords: | W/SiC nanometer multilayers multi target sputtering modulation structure modulation interface |
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