改进Turner法制备光纤探针的研究

研究了化学腐蚀方法制备近场光学显微镜光纤探针时外界因素和腐蚀溶液与保护液体系本身性质对光纤探针形貌的影响。结果表明腐蚀溶液和保护液二元体系的界面在光纤上形成的弯月面的高度与界面和探针之间形成的接触角、界面张力、密度差有关，在一定范围内弯月面的高度与光纤直径成正比。通过理论分析和实验结果相结合，对比管式腐蚀方法制备的光纤探针的形貌，我们发现Turner法制备光纤探针时探针锥面蜂窝状粗糙形貌是光纤探针成尖过程的本质上缺陷造成的。通过改进Turner法制备光纤探针的工艺，结果表明采用第二次修饰性腐蚀可以有效地改进探针的粗糙锥面，并增大探针的圆锥角。

Researches on the improved Turner method to fabricate fiber probes

NSOM probes were fabricated by chemical etching, the optical fiber probes were affected by the environment factor and the character of the system composed of etchant and coverlayer. The binary system was composed of etchant and coverlayer form a meniscus along the fiber, the meniscus height was decided by the contact angle, the interface tension and the density difference. The meniscus height is proportional to the optical fiber diameter in a certain range. According to theory analysis and experiment result and contrast with the fiber probes by tube etching, we found that honeycomb rough surface resulted from the process of forming taper. The improved Turner was that a second etching process was carried out after the end of classic Turner method. Better NSOM probes with smooth surface and larger cone angle were fabricated after our improved Tuner method