| 微观形貌扫描隧道显微镜检测的性能分析 |
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| 引用本文： | 李尚平,张鸿海,孙桂静,陈日曜.微观形貌扫描隧道显微镜检测的性能分析[J].华中科技大学学报(自然科学版),1994(2). |
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| 作者姓名： | 李尚平 张鸿海 孙桂静 陈日曜 |
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| 作者单位： | 华中理工大学机械工程一系 |
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| 摘 要： | 对自行研制的双功能扫描隧道显微镜（ＳＴＭ）的性能特点进行了研究，探讨了影响其纵、横向分辨率的有关因素；对其用于超精微观表面形貌的检测精度进行了分析，提出了其灵敏度、分辨率及视场连续可调的原理；并通过实验检测了原子级分辨率和纳米级分辨率的微观表面形貌，探讨了用ＳＴＭ在不同分辨率条件下对于微观形貌进行检测的可行性．
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| 关 键 词： | 扫描隧道显微镜，微观形貌，分辨率，灵敏度，精度，隧道电流 |
On Microtopography Detection with a Scanning Tunneling Microscope |
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| LiShangpingDept.of Mech.Engin,.On Microtopography Detection with a Scanning Tunneling Microscope[J].JOURNAL OF HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY.NATURE SCIENCE,1994(2). |
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| Authors: | LiShangpingDeptof MechEngin |
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| Abstract: | A new double -function scanning tunneling microscope is described,which can be used for microtopography detection not only in narrow range with a resolution at the atomic levelbut also in wide range with a resolution at the nanometer level.It has been found by theoret-ical and experimental investigation that the resolution,sensitivity and scanning range can beadjusted continuously. The factors influencing the detection accuracy are also studied, withmeasures to improve the accuracy proposed.A new method for the piezoelectric ceramic tubeto be directly driven by D/A to scan with a resolution at the atomic level has been found.And it has been proved that it is feasible to use the device developed for three-dimensionalmicrotopography detection. |
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| Keywords: | scanning tunneling microscope(STM ) microtopography resolution sensitiv-ity accuracy tunneling current |
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