| 有机介质等离子体增强CVD复合表面改性研究 |
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| 引用本文： | 陈颜堂,陈大凯.有机介质等离子体增强CVD复合表面改性研究[J].武汉科技大学学报(自然科学版),1992(4). |
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| 作者姓名： | 陈颜堂 陈大凯 |
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| 作者单位： | 武汉钢铁学院科研科，武汉钢铁学院金属材料教研室 |
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| 摘 要： | 作者用有机介质代替 TiCl_4进行 PCVD 工艺条件的试验,并以高速钢和工业纯铁为基体材料,研究了经 PCVD 改性后的表层化学成分及相结构。最后提出了涂渗层厚度与时间的关系。
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| 关 键 词： | 有机介质 等离子体 化学气相沉积 表面改性 |
MODIFICATION OF ORGANIC MEDIUM PLASMA STRENGTHEND CVD COMPOSITE COATING |
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| Chen Yantang Chen Dakai.MODIFICATION OF ORGANIC MEDIUM PLASMA STRENGTHEND CVD COMPOSITE COATING[J].Journal of Wuhan University of Science and Technology(Natural Science Edition),1992(4). |
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| Authors: | Chen Yantang Chen Dakai |
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| Institution: | Chen Yantang Chen Dakai |
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| Abstract: | Organic media are used instead of TiCl_4 to study the technologic control of PCVD prac- tice.High speed steel and commercial pure iron are used as matrices for PCVD modification and the study of the chemical composition and the phase structure in the coating.The relation be- tween thickness of penetration and time is proposed. |
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| Keywords: | organic media plasma chemical vapor deposition |
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