基于高清晰测量的多孔洞表面三维形貌分析

提出了一种基于双正交小波滤波方法来分析高清晰测量数据,实现了多孔洞表面三维形状误差和波纹度的分离.对连续表面和多孔洞表面进行仿真研究,以连续表面的滤波结果作为标准值,对于多孔洞表面的高斯滤波的三维波纹度参数SWa和SWt的偏差分别是153.7%和58.3%,而双正交小波的偏差分别只有0.50%和9.69%,从而验证了双正交小波变换在解决多孔洞表面形貌分析问题中的有效性.在发动机缸体顶面形貌分析中应用双正交小波滤波方法,有效地解决了传统滤波器的边界扭曲,得到了准确的三维形貌评定结果.

Three Dimensional Topography Analysis of Multi-Hole Surface Using High Definition Metrology

Abstract： A filter method based on biorthogonal wavelet transform was proposed to analyze the high definition metrology data, which can separate the surface three dimensional form error and waviness of multi-hole surfaces. The effectiveness of the proposed method was demonstrated by comparing it with Gaussian filtering based on simulated continuous surfaces and multi-hole surfaces. With the results obtained from continuous surfaces as references, the deviations of three dimensional waviness parameters SWa and SWt obtained from multi-hole surfaces are 153.7% and 58.3% for Gaussian filtering, and are 0.50% and 9.69% for biorthogonal wavelet transform. Moreover, the proposed method was applied in the three dimensional topography analysis of the top surface of the engine cylinder, which showed that the evaluation results of three dimensional topography for multi-hole surfaces without border distortions are accurate.