| 用连续波CO2激光对氮化硅陶瓷打孔的实验研究 |
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| 引用本文： | 陈可心,王卫乡,张有. 用连续波CO2激光对氮化硅陶瓷打孔的实验研究[J]. 华南师范大学学报(自然科学版), 2000, 0(1): 59-62 |
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| 作者姓名： | 陈可心 王卫乡 张有 |
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| 作者单位： | 华南师范大学量子电子学研究所!广州 510631(陈可心，张有，廖健宏)，广东省邮电管理局(王卫乡) |
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| 摘 要： | 报导用连续波ＣＯ２激光加工机对氮化硅陶瓷的激光打孔试验，获得了深径比达１８．７５的结果。
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| 关 键 词： | 激光加工 氮化硅陶瓷 激光打孔 二氧化碳激光 |
| 修稿时间： | 1999-12-22 |
EXPERIMENTAL INVESTIGATION ON LASER DRILLING OF Si_3N_4 CERAMICS WITH CW CO_2 LASER |
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| CHEN Kexin, WANG Weixiang, ZHANG You, LIAO Jianhong. EXPERIMENTAL INVESTIGATION ON LASER DRILLING OF Si_3N_4 CERAMICS WITH CW CO_2 LASER[J]. Journal of South China Normal University(Natural Science Edition), 2000, 0(1): 59-62 |
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| Authors: | CHEN Kexin WANG Weixiang ZHANG You LIAO Jianhong |
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| Abstract: | The test for laser of Si_3N_4 ceramics by CW CO_2 laser processing system is reported. The result shows that the proportion of depth to diameter is 18.75. |
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| Keywords: | CW CO_2 laser processing system Si_3N_4 ceramics laser drilling |
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