| 用发射光谱方法研究微波ECR等离子体电离特性 |
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| 引用本文： | 吴桂林,刘延伟.用发射光谱方法研究微波ECR等离子体电离特性[J].大连理工大学学报,1997,37(2):238-240. |
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| 作者姓名： | 吴桂林 刘延伟 |
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| 作者单位： | 大连理工大学三束材料改性国家重点实验室 |
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| 摘 要： | 记录并标识了氩气微波电子回旋共振（ＥＣＲ）等离子体在可见光区的发射光谱谱线；测定了氩原子谱线和离子谱线强度随微波功率和氩气气压的变化关系。指出随着微波功率的增加，原子谱线和离子谱线强度均增加并且呈现饱和趋势。
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| 关 键 词： | 发射光谱 电子回旋共振 等离子体 电离 |
Study of ionization properties of microwave ECR plasma by emission spectroscopy |
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| Wu Guilin, Liu Yanwei, Deng Xinlu, Liu Feng, Zhang Jialiang, Ma Tengcai.Study of ionization properties of microwave ECR plasma by emission spectroscopy[J].Journal of Dalian University of Technology,1997,37(2):238-240. |
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| Authors: | Wu Guilin Liu Yanwei Deng Xinlu Liu Feng Zhang Jialiang Ma Tengcai |
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| Abstract: | The emission spectral lines of Ar microwave ECR plasma in visible range were recoded and recognized. The intensities of Ar and Ar + emission spectral lines vary with microwave power and gas pressure, and they increase and tend to be saturated while microwave power increases. |
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| Keywords: | emission spectrographic analysis electron cyclotron resonance plasma ionization |
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