| 钼钨纳米合金膜的制备及其微结构研究 |
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| 引用本文： | 章娴君,郑慧雯,王显祥. 钼钨纳米合金膜的制备及其微结构研究[J]. 西南师范大学学报(自然科学版), 2003, 28(5): 762-765 |
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| 作者姓名： | 章娴君 郑慧雯 王显祥 |
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| 作者单位： | 西南师范大学,化学化工学院,重庆,400715 |
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| 基金项目： | 重庆市科委攻关项目资助(99-5663). |
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| 摘 要： | 利用羰基金属气相沉积方法，在Al2O3陶瓷基片上，以Mo(CO)6 W(CO)6为源，制备了Mo-W纳米合金晶膜.采用XRD和SEM技术，并与相同条件制备的Mo膜比较，研究了Mo-W合金晶膜的微结构．结果表明：该法制备的薄膜是以纳米粒子状态存在、具有超微结构的多晶膜材料．
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| 关 键 词： | 钼钨纳米合金膜 制备方法 微结构 羰基金属气相沉积方法 纳米结构 多晶膜材料 |
| 文章编号： | 1000-5471(2003)05-0762-04 |
| 修稿时间： | 2003-04-24 |
The Studies on the Preparation and the Microstructure of Mo-W Nano-structure Alloy Film |
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| ZHANG Xian-jun,ZHENG Hui-wen,WANG Xian-xiang School of Chemistry and Chemical Engineering,Southwest China Normal University,Chongqing ,China. The Studies on the Preparation and the Microstructure of Mo-W Nano-structure Alloy Film[J]. Journal of southwest china normal university(natural science edition), 2003, 28(5): 762-765 |
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| Authors: | ZHANG Xian-jun ZHENG Hui-wen WANG Xian-xiang School of Chemistry Chemical Engineering Southwest China Normal University Chongqing China |
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| Affiliation: | ZHANG Xian-jun,ZHENG Hui-wen,WANG Xian-xiang School of Chemistry and Chemical Engineering,Southwest China Normal University,Chongqing 400715,China |
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| Abstract: | The MoW alloy film with nano-structure has been prepared on Al_2O_3 ceramic substrate using Metal Organic Chemical Vapor Deposition of Mo(CO)_6 and W(CO)_6. The microstructure of MoW alloy film has been investigated by XRD and SEM, and compared with molybdenum film at the same conditions. It is showed that the alloy film is a polycrystall film with nanostructure. |
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| Keywords: | Chemical Vapor Deposition carbonyl metals nanostructure alloy films |
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