| 稀土元素修饰双层薄膜的气敏特性 |
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| 引用本文： | 管玉国,戴国瑞,南金. 稀土元素修饰双层薄膜的气敏特性[J]. 吉林大学学报(理学版), 1997, 0(1) |
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| 作者姓名： | 管玉国 戴国瑞 南金 |
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| 作者单位： | 吉林大学电子工程系!长春，130023，吉林大学电子工程系!长春，130023，吉林大学电子工程系!长春，130023 |
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| 摘 要： | 采用PECVD方法制备Fe2O3／SnO2双层气敏薄膜，利用浸渍方法对稀土元素（La，Nd，Sm，Er，Yb）与铝配制的乳浊液进行表面修饰．测试结果表明，修饰后的双层薄膜对乙醇或丙酮具有较高的灵敏度与选择性。
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| 关 键 词： | 双层薄膜 气敏特性 稀土元素 |
Gas-Sensitive Properties of Double-Layer Thin Films Modified by Rare Earth Elements |
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| Guan Yuguo, Dai Guorui, Nan Jin. Gas-Sensitive Properties of Double-Layer Thin Films Modified by Rare Earth Elements[J]. Journal of Jilin University: Sci Ed, 1997, 0(1) |
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| Authors: | Guan Yuguo Dai Guorui Nan Jin |
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| Abstract: | Fe2O3-SnO2 double-layer thin films were prepared by means of plasma enhanced chemicalvapour deposition method. The films were modified by being soaked in an ernulsive solution containingaluminium and rare earth elements (La, Nd, Sm, Er, Yb). The experimental results indicated thatthe modified thin films exibited a hlgh sensitivity and selectivity of to alcohol gas and acetone gas. |
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| Keywords: | double layer film gas sensitive characteristic rare earth elements |
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