台面结构硅光电集成微电动机的设计

In order to increase the operation lifetime and expand the range of the velocity measured, development of a mesa structure wobble micromotor with optical-electronic IC was reported.The mesa flange bearing of the micromotor was made of single crystal silicon instead of polysilicon (1.1μm) in the salient flange bearing micromotor.As a result, the mesa flange motor shows superior performance, such as higher strength, smaller frictional coefficient, more difficult worn and solid in structure.A solid axle instead of the hollow-center axle whose thickness was 2μm in the mesa flange micromotor, so that the deformation of axle from wearing and force suffering was eliminated.The lifetime of the micromotor was improved.Moreover, an optical-electrical IC for measuring rotative velocity of the micromotor was integrated in the micromotor, which could also be used as close loop control system or chopper light.Therefore, it is possible to manufacture the proper microelectromechanical systems by this process, which is simple and compatible with IC process.

Design of mesa structure wobble micromotor with optical-electronic IC