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The Effect of Discharge Power on the Atmospheric Pressure Non-equilibrium Ar/O2/TiCl4 Plasma Deposition of TiO2 Film |
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| Authors: | WANG De-xin YANG Qin-yu GUO Ying DING Ke ZHANG Jing |
| Affiliation: | 1. State Key Laboratory for Modification of Chemical Fibers and Polymer Materials, College of Material Science and Engineering,Donghua University, Shanghai 201620, China 2. College of Science, Donghua University, Shanghai 201620, China 3. State Key Laboratory for Modification of Chemical Fibers and Polymer Materials, College of Material Science and Engineering,Donghua University, Shanghai 201620, China;College of Science, Donghua University, Shanghai 201620, China |
| Abstract: | |
| Keywords: | atmospheric pressure non-equilibrium Ar/O2/TiCl4 plasma TiO2 discharge power |
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