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| 化学溶液沉积法制备铁掺杂镍酸镧薄膜的结构及电学性能研究 | |
| 引用本文： | 陈如麒,翁嘉文,劳媚媚,徐军,朱贵文.化学溶液沉积法制备铁掺杂镍酸镧薄膜的结构及电学性能研究[J].中山大学学报(自然科学版),2012,51(3):60-62. |
| 作者姓名： | 陈如麒 翁嘉文 劳媚媚 徐军 朱贵文 |
| 作者单位： | 1. 华南农业大学公共基础课实验教学中心,广东广州,510642 2. 华南农业大学理学院,广东广州,510642 3. 广东药学院物理与电子学教研室,广东广州,510006 |
| 基金项目： | 广东省高校优秀青年创新人才培育资助项目(LYM10036) |
| 摘 要： | 采用化学溶液沉积法，在（100）取向单晶硅衬底上制备铁掺杂镍酸镧（LaNi1-xFexO3，LNFeO-x）薄膜，研究了其结构和室温下的导电特性。X射线衍射测试结果表明，经700 ℃ 1 h退火的薄膜呈钙钛矿结构，没有可以观察到的杂相生成。薄膜表面平整、致密，没有微裂痕出现。随着铁含量的增加，薄膜电阻率由1.7 mΩ·cm 增加到 3.9 mΩ·cm。 |
| 关 键 词： | LaNi1-xFexO3 LNFeO-x 化学溶液沉积法 CSD |
| 收稿时间： | 2011-12-05; |
Structural and Electrical Properties of Fe-doped LaNiO3 Thin Film by Sol-gel Method |
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| CHEN Ruqi , WENG Jiawen , LAO Meimei , XU Jun , ZHU Guiwen.Structural and Electrical Properties of Fe-doped LaNiO3 Thin Film by Sol-gel Method[J].Acta Scientiarum Naturalium Universitatis Sunyatseni,2012,51(3):60-62. | |
| Authors: | CHEN Ruqi WENG Jiawen LAO Meimei XU Jun ZHU Guiwen |
| Institution: | 1.Center of Experimental Teaching for Common Basic Courses,South China Agricultural University, Guangzhou 510642,China; 2.College of Science,South China Agricultural University,Guangzhou 510642,China; 3.Guangdong Pharmaceutical University,Guangzhou 510006,China) |
| Abstract: | La1-xFexNiO3(LNFeO-x)thin films were prepared on(100) Si substrates by a chemical solution deposition method(CSD).Their structure and room temperature resitivity were analyzed.X-ray diffraction show that the thin films annealed at 700 ℃ for 1 h were grown in perovskite structure and no secondary phase was detected.The thin films were smooth,density and crack-free.The room temperature resistivity increases from 1.7 Ω·cm to 3.9 Ω·cm as x increases from 0 to 0.15. |
| Keywords: | La1-xFexNiO3 LNFeO-x chemical solution deposition method CSD |
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