| 高压绝缘α—Al2O3涂层的XPS和EELS表面分析 |
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| 引用本文： | 郑家贵,蒋立新,蔡亚平,罗四维,周心明. 高压绝缘α—Al2O3涂层的XPS和EELS表面分析[J]. 四川大学学报(自然科学版), 2001, 38(2): 201-204 |
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| 作者姓名： | 郑家贵 蒋立新 蔡亚平 罗四维 周心明 |
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| 作者单位： | 1. 四川大学材料科学系,
2. 中国工程物理研究院应用电子研究所, |
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| 基金项目： | 中国工程物理研究院基金!（95025） |
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| 摘 要： | 用不同配方的Mn,Cr,Ti混合物涂复α-Al2O3绝缘瓷表面，在适当的条件下热处理，利用XPS和EELS测试分析了表面层的电子能态，发现在退火后各涂层成分的含量变化明显，由于配方元素不同程度地扩散、渗透进95Al2O3陶瓷基底内，通过反应生成了新相；根据价带谱和EELS分析，其表面层的价带项移向真空能级，使能隙减小；能隙中的缺陷态、杂质态及表面态增加，有利于内次级电子的非弹性跃迁和二次电子发射系数的减小。
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| 关 键 词： | 氧化铝绝缘瓷 涂复热处理方法 XPS EELS 表面层 电子能态 二次电子发射系数 高压绝缘涂层 |
THE SURFACE ANALYSIS BY XPS AND EELS FOR HIGH-VOLTAGE INSULATED α-Al2O3 CERAMICZHENG |
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| Jia-gui,JIANG Li-xin,CAI Ya-Ping,LUO Shi-wei,ZHOU Xin-ming. THE SURFACE ANALYSIS BY XPS AND EELS FOR HIGH-VOLTAGE INSULATED α-Al2O3 CERAMICZHENG[J]. Journal of Sichuan University (Natural Science Edition), 2001, 38(2): 201-204 |
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| Authors: | Jia-gui JIANG Li-xin CAI Ya-Ping LUO Shi-wei ZHOU Xin-ming |
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| Abstract: | The mixed coats of Mn, Ti and Cr are applied to α-Al2O3 insulator,and then the heat treatment in special conditions is followed. The electronic energy states of the surface are analysed by XPS and EELS. It is found that coats components changed obviously after annealing. The new phases are formed because coats penetrate into and mix with 95 ceramic a-A12O3. From the results of the valence-band XPS spectrum and EELS,it is suggested that the decrease of energy gaps is because their valence-band top moves towards vacuum level. The increase in density of defectstate, impurity state and surface state in energy gap is beneficial to non-elastic transition of internal secondary electron. And for the decrease in secondary electron emission coefficient. |
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