小角度干涉条纹移动测量法

要 本文阐述具有角度的工件在干涉显微镜下移动，造成光程差的变化，从而引起干涉条纹的移 动。通过测量工件的移动量和干涉条纹移动量之间的关系计算工件角度．这种方法比起一般干涉 条纹不动的测量法可扩大测量范围、提高测量精度，使用也较方便．文中列举几个测量实例和数 据，并分析其测量精度。

Measurment of Small Angle by Moving Interference Fringe Method

This paper discusses the work piece with an angle, the movement of which under interference micrope produces change of optical path difference and leads to movement of the interference fringe. Through the relationship betwen move- ments of the work piece and the interference fringe, we can calculate the angle of the work piece. In comparison with the conventional method of stationary interference fringe, the new way enlarges the measuring range, improye the measuring accuracy and facilitates the measuring.