| Cr靶电流对磁控溅射C/Cr复合镀层性能和结构的影响 |
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| 引用本文： | 马婕,张永宏,蒋百灵.Cr靶电流对磁控溅射C/Cr复合镀层性能和结构的影响[J].西安理工大学学报,2007,23(1):10-13. |
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| 作者姓名： | 马婕 张永宏 蒋百灵 |
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| 作者单位： | 西安理工大学,材料科学与工程学院,陕西,西安,710048 |
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| 基金项目： | 国家高技术研究发展计划(863计划) |
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| 摘 要： | 使用闭合场非平衡磁控溅射离子镀技术制备了C/Cr复合镀层,并研究了Cr靶电流对C/Cr复合镀层摩擦学性能的影响规律。采用XPS检测了C/Cr复合镀层的化学成分,采用XRD分析了镀层的晶相结构,采用SEM观察了镀层的表面和断口形貌。实验结果表明:使用较小的Cr靶电流能改善镀层表面质量,降低镀层摩擦系数;Cr靶电流过大时,镀层的性能明显下降。
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| 关 键 词： | C/Cr复合镀层 Cr靶电流 摩擦学性能 显微结构 |
| 文章编号： | 1006-4710(2007)01-0010-04 |
| 修稿时间： | 2006-10-13 |
The Effects of Cr Current on the Properties and Microstructures of Magnetron Sputtered C/Cr Composite Coatings |
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| MA Jie,ZHANG Yong-hong,JIANG Bai-ling.The Effects of Cr Current on the Properties and Microstructures of Magnetron Sputtered C/Cr Composite Coatings[J].Journal of Xi'an University of Technology,2007,23(1):10-13. |
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| Authors: | MA Jie ZHANG Yong-hong JIANG Bai-ling |
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| Abstract: | C/Cr composite coatings were deposited by closed field unbalanced magnetron sputter iron plating technique.The effects of Cr current on the tribological properties of the C/Cr composite coatings were studied.The chemical compositions of the coatings were examined by XPS.The crystal phase structure of the coatings were analyzed using XRD and the coating surface and fracture morphology were observed using SEM.The results indicated that: C/Cr composite coatings with better surface quality and friction coefficient could be deposited by lower Cr current,and coatings deposited by high Cr current had undesirable properties. |
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| Keywords: | C/Cr composite coating Cr current tribological property microstructure |
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