| 静电声和超声传感器的进展(英文) |
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| 引用本文： | 葛立峰. 静电声和超声传感器的进展(英文)[J]. 安徽大学学报(自然科学版), 2000, 24(3): 75-84 |
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| 作者姓名： | 葛立峰 |
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| 作者单位： | 安徽大学自动化系，安徽合肥 230039 |
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| 基金项目： | 国家自然科学基金;69974001; |
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| 摘 要： | 对 2 0世纪声学测量静电 (或电容 )传感器的实验和理论的进展作了简短综述。重点放在微加工传感器及其理论建模。本文还讨论了传感器的分类 ,当前发展趋势和应用前景 ,显示了微加工声和超声传感器正将声学测量推进到一个全新的发展阶段。
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| 关 键 词： | 静电原理 静电传感器 传声器 超声传感器 微加工传感器 硅传感器 MEMS 建模 |
| 文章编号： | 1000-2162(2000)03-0075-10 |
Progress in Electrostatic Transducers for Sound and Ultrasound |
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| GE Li-feng. Progress in Electrostatic Transducers for Sound and Ultrasound[J]. Journal of Anhui University(Natural Sciences), 2000, 24(3): 75-84 |
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| Authors: | GE Li-feng |
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| Abstract: | Experimental and theoretical progress in electrostatic (or capacitive) transducers for acoustical measurements in the last century is reviewed. More attentions are paid to the micromachined transducers and their theoretical modelling. The paper discusses also the transducer classification, the current trade, the potential applications, and then shows that this type of transducers is promoting the acoustical measurement to a completely new stage. |
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| Keywords: | MEMS electrostatic principle electrostatic transducer microphone ultrasonic |
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