微系统制造中的3维微成形技术

该文提出了微系统的定义，指出了它区别于宏系统、微电子系统的特点及这些特点对微成形技术的影响。分析了作为现阶段微系统主流制造技术的微电子IC工艺的优缺点；评述了UGA、DRIE、微浮雕、RPM4种3维微成形法；指出了如何将其组合以适应微光学系统、微流体系统、微机构等商品化的配套需要；提出了微系统中值得研究的若干课题群。

Three-dimensional Micro Fabrication Technology about Manufacture of Micro System

This article brings forth the definition of micro system;it points out the differentia compared with normal system,micro electronic system,and the influence on micro fabrication technology accounted for the differentia.This paper analyses the advantages and disadvantages of micro electronics' IC technics,the main manufacturing method of micro system at present.It comments on four three dimensional methods,viz.LIGA,DRIE,Micro relief and RPM.The article points out how to scheme these methods in order to meet the commercial assorted needs of micro optical system,micro liquid system and micro mechanism,etc.At last,this paper sets forward some valuable project groups to be researched in the field of micro system.