| 超大规模集成电路微细加工精密工作台系统的动态响应 |
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| 引用本文： | 戴靖东. 超大规模集成电路微细加工精密工作台系统的动态响应[J]. 东南大学学报(自然科学版), 1987, 0(1) |
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| 作者姓名： | 戴靖东 |
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| 作者单位： | 南京工学院机械工程系 |
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| 摘 要： | 本文根据大规模和超大规模集成电路微细加工精密工作台的质量和刚度的实际分布情况,提出了一个多自由度系统的动力学模型,利用状态空间法求此精密工作台系统的动态运动规律,并借助电子计算机对其精确求解。
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| 关 键 词： | 微细加工 精密工作台 动态运动规律 |
Dynamic Response of an Accurate Positioning X-Y Stage System for Microfabrication in VLSI |
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| Dai Jingdong. Dynamic Response of an Accurate Positioning X-Y Stage System for Microfabrication in VLSI[J]. Journal of Southeast University(Natural Science Edition), 1987, 0(1) |
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| Authors: | Dai Jingdong |
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| Affiliation: | Department of Mechanical Engineering |
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| Abstract: | In conformity with a practical distrubition of the mass and stiffness of an accurate positioning X-Y stage for the mierofabrieation in VLSI, the paper offers a dynamic model of a system with multi-dimension of freedom and uses the state space method to find the motion rule of an accurate positioning X-Y stage system and to seek the accurate solution with the help of a computer. |
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| Keywords: | microfabrication accurate positioning stage dynamic motion rule. |
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