| 化学浴沉积法制备ZnS薄膜的研究 |
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| 引用本文： | 詹静,付非亚.化学浴沉积法制备ZnS薄膜的研究[J].信阳师范学院学报(自然科学版),2006,19(4):483-485. |
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| 作者姓名： | 詹静 付非亚 |
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| 作者单位： | 华中科技大学,电子科学与技术系,湖北,武汉,430074 |
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| 摘 要： | 基于化学浴沉积法,采用硫酸锌、硫脲、水合肼和氨水混合溶液于适当温度下在玻璃衬底上沉积得到表面均匀的ZnS薄膜.对在不同沉积时间以及退火时间下得到的ZnS薄膜运用X射线衍射法观测其晶型结构,发现较长的沉积时间(5 h)和退火时间(3 h)制得的薄膜结晶度好,且检测出为闪锌矿晶型.并对其透光性能做了检测,发现pH值对透光度有显著影响.
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| 关 键 词： | ZnS薄膜 化学浴沉积法 XRD |
| 文章编号： | 1003-0972（2006）04-0483-03 |
| 收稿时间： | 2006-05-16 |
| 修稿时间： | 2006年5月16日 |
A Study of Preparation of ZnS thin films by CBD |
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| ZHAN Jing,FU Fei-ya.A Study of Preparation of ZnS thin films by CBD[J].Journal of Xinyang Teachers College(Natural Science Edition),2006,19(4):483-485. |
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| Authors: | ZHAN Jing FU Fei-ya |
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| Institution: | Huazhong University of Science and Technology,Wuhan 430074,China |
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| Abstract: | ZnS thin films were prepared by chemical bath deposition(CBD),using mixed aqueous solutions of zinc sulfate,thiourea, hydrazine hydrate and ammonia on glass sides,the as-deposited thin films were surface homogeneous.The crystal structure of ZnS thin films obtained under different deposition time and anneal time conditions is studied by XRD and it indicates that adequate deposition time(5 h)and anneal time(1 h) is very good to grow highly crystalized ZnS thin films of sphalerite structure.Optical transparency property is also discussed and it is found that pH value has an obvious influence on it. |
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| Keywords: | ZnS thin films chemical bath deposition(CBD) XRD |
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