中频溅射法制备薄膜电池正极LiCoO2薄膜结构的研究

采用大型中频磁控溅射系统制备了全固态薄膜电池用LiCoO_2阴极薄膜材料,研究了退火前后其结构及形貌的变化。结果表明,沉积的LiCoO_2薄膜具有晶态结构;沉积状态薄膜的晶体取向决定着退火后薄膜的晶体择优取向,退火只是使晶粒更加完整,并使择优取向发展得更好;沉积过程的O_2/Ar(氧分压)对薄膜的晶体取向影响很大,适当控制沉积条件,采用工业规模的中频磁控溅射设备可以制备出取向良好的LiCoO_2薄膜阴极材料。

Microstructure of LiCoO_2 Cathode Film Deposited by Intermediate Frequency Magnetron Sputtering

LiCoO2 thin films used for Cathode of solid thin film cells was deposited by large scale intermediate frequency magnetron sputtering. The microstructure and morphology of the films and the effects of annealing temperatures were studied. The results showed that the as-deposited thin films were crystallized. The orientation of the film after annealing is mainly determined by the orientation of as-deposited film. The ratio of Ar/O2 during deposition influences the orientation of LiCoO2 film obviously.LiCoO2 cathode film with satisfied orientation can be obtained by means of large scale medium frequency sputtering under proper deposited condition.