| 双狭缝式光触针表面轮廓传感器的研究 |
| |
| 引用本文： | 严慎 马石林. 双狭缝式光触针表面轮廓传感器的研究[J]. 上海交通大学学报, 1992, 26(4): 66-72 |
| |
| 作者姓名： | 严慎 马石林 |
| |
| 作者单位： | 上海交通大学精密仪器系，上海交通大学精密仪器系，上海交通大学精密仪器系 |
| |
| 摘 要： | 本文提出一种双狭缝式光触针表面轮廓传感器,并采用激光束光学方法计算其特性及各结构参数与特性的关系.实验研究所得到的特性曲线和理论分析是一致的.本文还给出了对矩形轮廓及三角形轮廓样板的实测结果.
|
| 关 键 词： | 激光 触针 轮廓 测量 传感器 |
A Study of a Double-slit Optical Surface Profile Transducer |
| |
| Yan Shen Ma Shilin Zhang E. A Study of a Double-slit Optical Surface Profile Transducer[J]. Journal of Shanghai Jiaotong University, 1992, 26(4): 66-72 |
| |
| Authors: | Yan Shen Ma Shilin Zhang E |
| |
| Affiliation: | Yan Shen Ma Shilin Zhang E |
| |
| Abstract: | In this paper,a double-slit defocusing laser probe for measuring sur-face profiles is introduced.The method of laser beam optics is employed as a meansto calculate both the properties of the transducer and the relationship between theproperties and the structure parameters.Experimental results showed good consis-tency with that of theoretieat analysis.Practical results from the measurement ofthe rectangular and triangular standard profiles are also given here. |
| |
| Keywords: | laser probes profile measurements transducers ABCD law |
| 本文献已被 CNKI 维普 等数据库收录！ |
