| 脉冲激光沉积薄膜创新开放实验的探索 |
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| 引用本文： | 符跃春. 脉冲激光沉积薄膜创新开放实验的探索[J]. 实验室科学, 2012, 15(3): 67-69 |
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| 作者姓名： | 符跃春 |
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| 作者单位： | 广西大学材料科学与工程学院,广西南宁,530004 |
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| 基金项目： | 广西高等教育教学改革工程“十一五”立项项目 |
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| 摘 要： | 利用大学生创新开放实验平台,设计了脉冲激光沉积薄膜实验。通过研究制备工艺对薄膜质量的影响,测量了最佳制备工艺条件下TiN薄膜的结构、表面形貌和光学性能。实验激起了学生的科学研究兴趣,对培养学生的创新意识和实践能力具有重大意义。
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| 关 键 词： | 薄膜 脉冲激光沉积 创新开放实验 教学改革 |
Exploration on innovative and open experiments of pulsed laser deposited thin films |
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| FU Yue-chun. Exploration on innovative and open experiments of pulsed laser deposited thin films[J]. Laboratory Science, 2012, 15(3): 67-69 |
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| Authors: | FU Yue-chun |
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| Affiliation: | FU Yue-chun (College of Materials Science and Engineering, Guangxi University, Nanning 530004, China) |
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| Abstract: | The exploratory experiments on pulsed laser deposited films are carried out through the in- novative and open experimental platform. By studying the effects of processing parameters on the film quality, we test the crystal structure, surface morphology and optical properties of TiN films under the optimal conditions. These experiments excitates students research interest and improves their innova- tive consciousness and practice ability. |
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| Keywords: | thin films pulsed laser deposition innovative and open experiments teaching reform |
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