| 大行程压电微动台的有限元分析与实验 |
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| 引用本文： | 权哲浩,林玉池,赵美蓉,齐永岳.大行程压电微动台的有限元分析与实验[J].天津大学学报(自然科学与工程技术版),2007,40(7):821-826. |
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| 作者姓名： | 权哲浩 林玉池 赵美蓉 齐永岳 |
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| 作者单位： | 天津大学精密测试技术及仪器国家重点实验室，天津大学精密测试技术及仪器国家重点实验室，天津大学精密测试技术及仪器国家重点实验室，天津大学精密测试技术及仪器国家重点实验室 天津300072，金日成综合大学物理学院，朝鲜，天津300072，天津300072，天津300072 |
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| 摘 要： | 设计了一种基于尺蠖运动原理的大行程纳米级步距压电微动台,变传统单驱动器结构为双驱动器结构,采用"推-拉"接力运动原理,实现了大的驱动力与行程.利用有限元方法对压电微动台的结构和静、动态特性进行了研究.实验结果表明,压电微动台的运动范围为11 mm,稳定性好,载物力可以达到24.5 N,最小步距小于20 nm.
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| 关 键 词： | 压电微动台 尺蠖运动 有限元分析 静态特性 动态特性 |
| 文章编号： | 0493-2137（2007）07-0821-06 |
| 修稿时间： | 2006-12-19 |
Finite Element Analysis and Experiment on Long-Travel Piezoelectric Micro-Positioner |
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| KWON Chol-ho,LIN Yu-chi,ZHAO Mei-rong,QI Yong-yue.Finite Element Analysis and Experiment on Long-Travel Piezoelectric Micro-Positioner[J].Journal of Tianjin University(Science and Technology),2007,40(7):821-826. |
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| Authors: | KWON Chol-ho LIN Yu-chi ZHAO Mei-rong QI Yong-yue |
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| Institution: | 1. State Key Laboratory of Precision Measurement Technology and Instrument, Tianjin University, Tianjin 300072, China;2. School of Physics, KIM IL SUNG University, DPR Korea |
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| Abstract: | A novel piezoelectric micro-positioner with long-travel and nano-stepping was designed based on the principle of inchworm motion.In structure design,the traditional single frame was updated to double actuators.With the novel principle of push-pull relay movement,the piezoelectric(PZT) actuator realized the great driving force and the long-travel.By using the finite element analysis software,the structure and the static and dynamic characteristic of piezoelectric micro-positioner were investigated.The experiment results show that the moving range of the piezoelectric micro-positioner is 11 mm with good stability,the loading capacity is 24.5 N,and the mini-real step is less than 20 nm. |
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| Keywords: | piezoelectric micro-positioner inchworm motion finite element analysis static characteristic dynamic characteristic |
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