| X射线衍射仪角度校准的光学新方法 |
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| 引用本文： | 崔建军,高思田,邵宏伟,杜华,王鹤岩.X射线衍射仪角度校准的光学新方法[J].天津大学学报(自然科学与工程技术版),2014,47(8):747-752. |
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| 作者姓名： | 崔建军 高思田 邵宏伟 杜华 王鹤岩 |
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| 作者单位： | 1. 天津大学精密测试技术及仪器国家重点实验室,天津300072;中国计量科学研究院,北京100013
2. 中国计量科学研究院,北京,100013 |
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| 基金项目： | 国家自然科学基金重点资助项目，中国计量科学研究院基本业务费资助项目，自筹基本业务费资助项目，机械设计及理论浙江省重中之重学科和浙江理工大学重点实验室开放基金资助项目 |
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| 摘 要： | 目前X射线衍射仪(XRD)的角度检定和校准测试主要依据JJG 629—1989《多晶X射线衍射仪检定规程》和JB/T 9400—2010《X射线衍射仪技术条件》等技术文件,具体方法是采用光学经纬仪或多面棱体等进行测试,该测量方法实际应用中存在一定难度,其次测量间隔较大,不能很好反映真实的角度误差规律.为此,提出了利用θ角和2θ角同轴并可独立运动的特点,组合采用光电自准直仪和小角度激光干涉仪等仪器,设计了一种新的XRD的角度校准方法,它能够自动快速地连续测量角度,取k=2时,扩展不确定度约1.2″.使用该方法测试能够精确得到θ和2θ轴的误差数据,可用于修正XRD测角误差,提高XRD测试精度.该方法也适用于同步辐射等大型衍射系统等其他需要角度校准的情况.
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| 关 键 词： | 计量学 角度测量 X射线衍射 干涉测量 X射线衍射仪校准 计量校准标准 |
New Optics Calibration Method for Goniometer of X-Ray Diffractometer |
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| Cui Jianjun,Gao Sitian,Shao Hongwei,Du Hua,Wang Heyan.New Optics Calibration Method for Goniometer of X-Ray Diffractometer[J].Journal of Tianjin University(Science and Technology),2014,47(8):747-752. |
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| Authors: | Cui Jianjun Gao Sitian Shao Hongwei Du Hua Wang Heyan |
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| Institution: | Cui Jianjun,Gao Sitian,Shao Hongwei,Du Hua,Wang Heyan( 1.State Key Laboratory of Precision Measuring Technology and Instruments, Tianjin University,Tianjin 300072, China;National Institute of Metrology, Beijing 100013, China) |
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| Abstract: | In China,the goniometer calibration for X-ray diffractometer is mainly referred to JJG 629-1989 《 Verification Regulation for Polycrystalline X-Ray Diffractometer》 and JB/T 9400-2010 《 Specification for X-Ray Diffractometer》.Optical theodolite and polygon are used to test goniometer,but these methods are complex and hard to test.So a new optics calibration method is presented,which can automatically measure the angular misalignment of the θ axis and 2θ axis with very small steps.The measuring system is composed of photoelectric autocollimator and small-angle laser interferometers,and the measure uncertainty is about 1.2 arc seconds （k =2）.The whole set of angular error records obtained can be used to compensate for angular misalignment in future calculations.This method is also suited for calibrating the angular error of twin axial measure system. |
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| Keywords: | metrology angle measurement X-ray diffraction interforometer X-ray diffractometer calibration metrology and calibration standards |
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