| 物镜像差对激光扫描精度影响的测量与补偿 |
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| 引用本文： | 曹俊卿,吉建华.物镜像差对激光扫描精度影响的测量与补偿[J].上海理工大学学报,1998,20(3):273-276. |
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| 作者姓名： | 曹俊卿 吉建华 |
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| 作者单位： | 上海理工大学仪器仪表学院 |
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| 摘 要： | 在工程使用激光扫描进行放样时，物镜像差对扫描精度的影响是不能忽略的，本文提出的直接测量方法，可以对未知结构的大相对孔径物镜的扫描误差实现高精度测量，测量灵敏度可达最大扫描范围的０．０１％，根据这一测量结果采用线性插值对扫描误差进行补偿，能够保证像差造成的扫描误差小于０．０２％。实验结果及其数字模拟证明这种方法是有效的
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| 关 键 词： | 像差 扫描误差 测量 补偿 精度 激光扫描精度 |
Measurement and compensation of laser scanningerror caused by objective aberration |
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| Cao Junqing,Ji Jianhu,Chen Jiabi,Zhuang Songlin.Measurement and compensation of laser scanningerror caused by objective aberration[J].Journal of University of Shanghai For Science and Technology,1998,20(3):273-276. |
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| Authors: | Cao Junqing Ji Jianhu Chen Jiabi Zhuang Songlin |
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| Abstract: | Affect of objective aberration on scanning accuracy can not be neglected whenlofting. The direct measurement method presented in the paper can estimate the error with highaccuracy for the objective. The sensitivity of the measurement can reach 0.01% of the scanningrange and the scanning error can be less than 0.02% after compensation by linearinterpolation. The experimental results and the numerical simulations show the effectiveness ofthe method proposed. |
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| Keywords: | aberration scanning error measurement compensation |
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