多级查分真空系统设计、研制和调试

线性离子阱-飞行时间质谱（Linear ion trap-time of flight mass spectrometer，LIT-TOFMS）是一种具有分析速度快、分辨率高、灵敏度高的多级串联质谱，而差分真空系统则是LIT-TOFMS研制的基础。本文从差分真空系统的原理着手，通过对差分系统材料、测量元件以及排气系统的选择等，设计了LIT-TOFMS差分真空系统-四级差分真空系统。理论计算和测试结果均表明，该系统基本满足了LIT-TOFMS的要求，并实现从工作在大气压下的离子源到真空度10-4Pa分析器的顺利过渡，为LIT-TOFMS的研制提供了可靠保证。

The Design,Calculation and Adjustment of Multi-Differential Vacuum System

Linear ion trap-time of flight mass spectrometer (LIT-TOFMS) is one of multi-stage tandem mass spectrometry with high detection efficiency, high resolving power and high sensitivity. The differential vacuum system is the foundation of LIT-TOFMS. Basing on the principle of differential vacuum system, this paper introduces the choice of materials, vacuum measurement elements and pumping system. By the calculation, the LIT-TOFMS vacuum system- four-stage differential vacuum system is successfully designed. Both the calculations and the experiment results can prove that this system could meet the requirements of LIT-TOFMS and realize the pressure transition from atmospheric pressure to 10-4Pa, which is a reliable guarantee for the research and development of LIT-TOFMS.