能谱DEAX无标定量联立方程法探讨

由ＥＤＡＸ能谱仪系统所提供的无标样半定量分析程序，是根据纯元素强度因子来计算样品含量的，现引入一种联立方程无标定量分析方法，它是利用ｎ个包含元素相同而成份完全不同的样品，建立一组利用ＺＡＦ修正的ｎ个线性方程，经过反复迭代运算，最后得到关于样品含量的满意结果。

A Discussion to Standardless Simultaneous Equation Method in EDS Quantitative Analysis

The quantitative analysis in EDS is usually compared with pure elements as a standard samples, the program of standardless super quantitative analysis (SQU)provided by EDAX system is based on using a pure element intensity factor to calculate contents of specimen. This paper, a standardless method of a simultanneous equation quantitative analysis is introduced. It makes full use of a groups of specimeen which contains some element and different element content to set up a group of a line equations using the ZAF correction. We obtained finally a satisfied result in the iterative calculation of correction.