电感式位移传感器测量系统精度损失诊断

实际应用过程中,时间的推移和系统内外的异常因素,导致动态测量系统,尤其是带有机械结构的动态测量系统的精度无法保持.为了及时了解系统内部各结构单元的精度损失情况,并为系统的优化设计提供理论依据,利用误差分解和溯源的方法,诊断电感式位移传感器动态测量系统各组成单元的精度损失.实验结果表明：对整个测量系统总精度损失影响最大的是偏心轮的精度损失;对于位移传感器,其测量总精度损失与偏心轮的精度损失无关,放大电路倍数的损失是最主要的影响因素.

Accuracy losing diagnosis about measuring-system of differential mutual inductive displacement censor

In practical application process,time passing and abnormal factors inside and outside the system may lead to the precision loss of the dynamic measurement system,especially the system with mechanical structure.In order to understand the precision loss of the structural units inside the system in time,and offer theoretical basis for systematic optimizing design,this paper introduces the use of the method of error decomposition and tracing to diagnose the precision loss of each composing unit of the dynamic measurement system of inductive displacement sensor.Experimental results show that the precision loss of the eccentric wheel is the biggest influencing reason for the precision loss of the whole measurement system;for the displacement sensor,its precision loss is independent of the eccentric wheel's precision loss,the loss of the circuit amplification is the biggest influencing factor.