氢等离子体处理P层对非晶硅太阳能电池开路电压的影响

为拓展非晶硅太阳能电池的应用，有必要提高其开路电压。本文讨论氢等离子体处理对P层和非晶硅太阳能电池性能参数的影响。结果表明：用氢等离子体处理P层可以使电池的平均开路电压提高0．0257V，平均填充因子提高0．039，平均能量转换效率提高0．45％，实验中获得的最高开路电压为0．99V。用氢等离子体处理P层可以提高P层的晶相比，使更多的光子被本征层吸收。此外，这种处理工艺与非晶硅太阳能电池的制备工艺相兼容。

EFFECT OF TREATING THE P LAYER BY HYDROGEN PLASMA ON THE OPEN CIRCUIT VOLTAGE OF AMORPHOUS SILICON SOLAR CELLS

It is necessary to improve the open circuit voltage of amorphous silicon solar cells for its applications. In this paper, we discuss the effects of hydrogen plasma treatment on the P layer and the performance of the amorphous silicon solar cells. The result shows that the open circuit voltage increased by 0. 0257 V, the fill factor increased by 0. 039 and the energy conversion efficiency increased by 0.45%. The highest VOC we got was 0.99 V. Treating P layer with hydrogen plasma has been demonstrated to result in materials with improved crystalline volume fraction which was very effective to increase the light absorption of the intrinsic layer. What is more, it could be easily integrated into the amorphous silicon solar cell mass production process.