Institution: | Yukihiro KATO~(1,a),Ryoji FUKUDA~(2,b),Yuta TAKENO~(2,c),Toshitada SHIMOZAKI~(3,d),Takahisa OKINO~(2,e) 1.Department of Design Engineering,Semiconductor Business Division,Mitsumi Electric Co.,Ltd,Atugi 243-0004,Japan,2.Department of Architecture and Mechatronics,Faculty of Engineering,Oita University,Oita 870-1192,3.Department of Materials and Technology,Kyushu Institute of Technology,Kitakyushu 804 |