物镜的优化场分布设计方法研究

采用欧拉方程数值解法和有限元数值计算方法,将“优化法”和“修正法”结合起来进行透镜设计。获得了电子探针中物镜的最佳场分布,并用线性场来逼近该场,有产地改进了物镜的性能。

DESIGN METHOD ON OPTIMUM FIELD OF OBJECTIVE LEN

In the paper The author designed an objective lens by combining " Optimum method " with " modify measurement " in which numerical solution of Enler's equation and limited elements calculation have been used. A optimum field in the objective of the electron probe can be obtained with which a linear field may be taken to approach along. Having considered the effects of the various electron optical aberrations, he has approved an optimum gradient of rising in the linear field. The computing was made on IBM-370 computer.