圆筒型永磁同步直线电机大行程无过冲纳米定位驱动

为减少圆筒型永磁同步直线电机(TPMSLM)在直接驱动方式下的电磁扰动对纳米定位的影响，研究 了TPMSLM定子与动子偏心安装的驱动模式，用于改变TPMSLM内部空间磁场分布，使包含电磁扰动的轴向电 磁推力得到有效衰减，同时产生包含电磁扰动的径向电磁力，当两者与导轨摩擦阻尼共同作用时，可实现对电磁扰 动的有效吸收. 针对TPMSLM定位过冲，研究了变系数PI控制算法，用于实时改变系统的动静态驱动特性，达到 对大行程驱动和纳米定位驱动的最佳控制. 实验表明，TPMSLM偏心驱动模式及变系数PI控制算法能较好地满足 大行程无过冲定位驱动和稳态定位波动小于10 nm的要求.

Large Travel Range Nanopositioning Actuation without Overshooting for Tubular Permanent Magnet Synchronous Linear Motor

To reduce electromagnetic disturbance of nanopositioning caused by direct actuation of cylindrical permanent magnet synchronous linear motor (TPMSLM), the actuation mode of rotor and stator's eccentric installation of TPMSLM is studied. The actuation mode changes the interior space magnetic field distribution of TPMSLM, therefore the axial electromagnetic force containing electromagnetic disturbance is decreased and the radial electromagnetic force containing electromagnetic disturbance is produced. When guide damping is added, a large amount of electromagnetic disturbance can be absorbed. Further more, to prevent large po-sitioning overshooting, a PI control algorithm with variable coefficients is studied, which changes dynamical and static actuation characteristics of system in real-time to supply optimal control parameters for large travel range actuation and nanopositioning actuation. Experimental results indicate that, using the eccentric ac-tuation mode and variable coefficient PI control algorithm, large travel range positioning actuation without overshooting and accurate positioning with errors less than 10 nm are achieved.