首页 | 本学科首页   官方微博 | 高级检索  
     

基于 CFX软件的氮化硅反应炉内热过程的数值模拟
引用本文:陈锦,杨晶,尹少武,王立. 基于 CFX软件的氮化硅反应炉内热过程的数值模拟[J]. 北京科技大学学报, 2005, 27(6): 710-715
作者姓名:陈锦  杨晶  尹少武  王立
作者单位:北京科技大学机械工程学院,北京,100083
基金项目:教育部留学回国人员科研启动基金
摘    要:利用大型商业软件CFX建立了高温氮化硅反应炉内温度场的数学模型,采用拟流体模型数值模拟炉内的层流流动,分析了氮气体积流量、各向异性散射和辐射特性等因素对温度场和产物质量浓度的影响.计算结果表明,为确保反应充分完全,预热段温度控制显得非常重要,而氮气体积流量起着决定性的作用;各向异性散射对径向温度、产物质量浓度有一定的影响;散射率对温度场影响很小;计算值与实验值相比较,误差在10%之内.

关 键 词:反应炉  氮化硅  温度场  数值模拟  软件  氮化硅  反应炉  热过程  数值模拟  furnace  thermal process  simulation  误差  比较  实验值  计算值  散射率  浓度的影响  质量浓度  温度控制  径向  作用  预热  完全
收稿时间:2004-11-15
修稿时间:2005-03-02

Numerical simulation on thermal process in an Si3N4-reaction furnace with CFX
CHEN Jin,YANG Jing,YIN Shaowu,WANG Li. Numerical simulation on thermal process in an Si3N4-reaction furnace with CFX[J]. Journal of University of Science and Technology Beijing, 2005, 27(6): 710-715
Authors:CHEN Jin  YANG Jing  YIN Shaowu  WANG Li
Affiliation:Mechanical Engineering School, University of Science and Technology Beijing, Beijing 100083, China
Abstract:A numerical simulation on the thermal process for an Si3N4-reaction furnace based on the software CFX was investigated. A similar flow model was used to numerically simulate the laminar flow in the furnace. The influence of some different factors such as volume quantity of N2, anisotropic scattering and radiation properties on the temperature field and mass density of products was studied. The results showed that the temperature control on the preheating zone was important for full reaction. However, the volume quantity of N2, i.e., inlet velocity, plays a crucial role. Anisotropic scattering influenced on the radial temperature and mass density of products. Absorption coefficient and scattering coefficient influenced little on the temperature field. The error between simulated and experimental values was less than 10%.
Keywords:silicon nitride   numerical simulation    temperature field   reaction furnace
本文献已被 CNKI 维普 万方数据 等数据库收录!
设为首页 | 免责声明 | 关于勤云 | 加入收藏

Copyright©北京勤云科技发展有限公司  京ICP备09084417号