| 阴极真空弧放电等离子体的过滤及传输 |
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| 引用本文： | 罗云,张孝吉,张荟星,周凤生,吴先映. 阴极真空弧放电等离子体的过滤及传输[J]. 北京师范大学学报(自然科学版), 1996, 0(3) |
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| 作者姓名： | 罗云 张孝吉 张荟星 周凤生 吴先映 |
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| 作者单位： | 北京师范大学低能核物理研究所 |
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| 摘 要： | 阴极真空孤放电产生高密度等离子体的同时，也产生了尺寸可达微米量级的液滴，液滴对膜层的污染限制了它的应用。为解决这个问题，可采用轴对称磁场约束阴极斑，磁过滤器过滤等离子体出束中的液滴。结果表明液滴在磁过滤器出口处已基本上被过滤掉了，该处离子束流达到１２０ｍＡ。
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| 关 键 词： | 阴极真空孤放电；等离子体；磁过滤器 |
FILTRATION AND TRANSPORTATION OF CATHODE VACUUM ARC DISCHARGE PLASMA |
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| Luo Yun, Zhang Maoji, Zhang Huixing, Zhou Fengsheng, Wu Xianying. FILTRATION AND TRANSPORTATION OF CATHODE VACUUM ARC DISCHARGE PLASMA[J]. Journal of Beijing Normal University(Natural Science), 1996, 0(3) |
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| Authors: | Luo Yun Zhang Maoji Zhang Huixing Zhou Fengsheng Wu Xianying |
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| Abstract: | Cathode vacuum arc discharge plasma deposition is a promising technique for the production of thin films. Along with the plasma, droplets of size up to some microns are produced at the cathode spots. Contammation of the films by droplets represents a major obstade to broad application of cathode vacuum are discharge plasma deposition. Attempts have been made to solve this problem by steering the cathode spots by a magnetic field, and by removing the droplets by a magnetic filter. Results show that droplets have been filtered out at the magnetic filter's exit, and the ion beam current here has reached 120 mA. |
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| Keywords: | cathode vaccum are discharge plasma magnetic filter |
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