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基于虚拟仪器技术的薄膜电磁参量测量
引用本文:陈妮利,江建军,张秀成,何华辉. 基于虚拟仪器技术的薄膜电磁参量测量[J]. 华中科技大学学报(自然科学版), 2004, 32(11): 54-55,58
作者姓名:陈妮利  江建军  张秀成  何华辉
作者单位:华中科技大学,电子科学与技术系,湖北,武汉,430074;华中科技大学,电子科学与技术系,湖北,武汉,430074;华中科技大学,电子科学与技术系,湖北,武汉,430074;华中科技大学,电子科学与技术系,湖北,武汉,430074
基金项目:国家自然科学基金资助项目 (5 0 3710 2 9),湖北省自然科学基金资助项目 (2 0 0 2AB0 33)
摘    要:基于谐振腔微扰技术,利用先进的矢量网络分析仪,结合虚拟仪器技术研制了一套测量薄膜微波电磁参量的自动测量系统.该系统可以方便、快捷地测量薄膜在微波频率下的复介电常数和复磁导率.图形化编程语言LabVIEW大大缩短了系统开发时间,提高了编程效率.

关 键 词:薄膜  测量  复介电常数  复磁导率
文章编号:1671-4512(2004)11-0054-02
修稿时间:2004-03-03

Measurement of electromagnetic parameters of thin films magnetic materials based on virtual instrumentation
Chen Nili Jiang Jianjun Zhang Xiucheng He Huahui Chen Nili Postgraduate, Dept. of Electronic Sci. , Tech.,Huazhong Univ. of Sci. , Tech.,Wuhan ,China.. Measurement of electromagnetic parameters of thin films magnetic materials based on virtual instrumentation[J]. JOURNAL OF HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY.NATURE SCIENCE, 2004, 32(11): 54-55,58
Authors:Chen Nili Jiang Jianjun Zhang Xiucheng He Huahui Chen Nili Postgraduate   Dept. of Electronic Sci. & Tech.  Huazhong Univ. of Sci. & Tech.  Wuhan   China.
Affiliation:Chen Nili Jiang Jianjun Zhang Xiucheng He Huahui Chen Nili Postgraduate, Dept. of Electronic Sci. & Tech.,Huazhong Univ. of Sci. & Tech.,Wuhan 430074,China.
Abstract:Based on the perturbation theory, an automatic measurement system of virtual instrumentation by advanced vector network analyzer was developed for measuring electromagnetic parameters of nano-magnetic thin films materials under microwave frequency. By means of this system, the complex permittivity of thin films samples and its complex permeability can be measured quickly and accurately. LabVIEW, a kind of graphic programming language can reduce development time and improve programming efficiency.
Keywords:thin film  measurement  complex permittivity  complex permeability
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